Nitridation of large silicon surfaces at low temperatures by electron cyclotron resonance plasma 等离子体对硅表面的低温大面积氮化
To overcome the bottle - neck , electron cyclotron resonance - plasma enhanced metalorganic chemical vapor deposition was developed 为了解决这一问题,电子回旋共振ecr等离子体增强有机金属气相沉积( ecr - pemocvd )应运而生。
Microwave electron cyclotron resonance ( mwecr ) cvd is a newly developed technique for plasma processing and materials fabrication , such as plasma etching and films deposition 本论文介绍了我们对ecr等离子体cvd系统的测试、 bn薄膜的制备和薄膜光学特性研究。
Yak hairs were treated by the microwave electron cyclotron resonance plasma reactive ion etching ( ecr - rie ) equipment to improve its property of weave 摘要采用微波电子回旋共振等离子体反应离子刻蚀( ecr - rie )装置对牦牛毛纤维进行表面改性,从而改善牦牛毛的可纺性。
Sub - thesis is mainly on the test and research of the photoelectric properties of a - si : h thin film deposited by microwave electron cyclotron resonance chemical vapor deposition ( mw - ecr cvd ) system 本论文主要是对mw - ecrcvd系统沉积的a - si : h薄膜进行了一系列的光电特性的测试研究工作。
Electron cyclotron resonance is a phenomenon observed in plasma physics, condensed matter physics, and accelerator physics. An electron in a static and uniform magnetic field will move in a circle due to the Lorentz force.